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SEMI E14 - Measurement of Particle Contamination Contributed to the Product from the Process or Support Tool
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E15 - Specification for Tool Load Port
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E15.1 - 300 mm装置ロードポートのための仕様
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E15.1 - Specification for 300 mm Tool Load Port
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E17 - マスフローコントローラの過渡特性テストのガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E19 - Specification for Standard Mechanical Interface (SMIF)
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF)
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E19.5 - Specification for 300 mm Bottom-Opening Standard Mechanical Interface (SMIF)
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E20 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard
Sale price
Member Price : $144.00
SEMI E21 - Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E23 - Specification for Cassette Transfer Parallel I/O Interface
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E23 - カセット搬送パラレルI/Oインタフェースのための仕様
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E26 - Radial Cluster Tool Footprint Standard
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E27 - マスフローコントローラおよびマスフローメータの直線性のガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E28 - マスフローコントローラの圧力仕様のガイドライン
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00