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F02500 - SEMI F25 - Specification for Particle Concentration of Grade 10/0.2 Oxidant Specialty Gases
F02600 - SEMI F26 - Specification for Particle Concentration of Grade 10/0.2 Toxic Specialty Gases
F02600 - SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様
SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00
F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
F02700 - SEMI F27 - ガス配分システムおよび部品の水分相互作用および含有量の大気圧電離質量分析(APIMS)による,テスト方法
F02800 - SEMI F28 - Test Method for Measuring Particle Generation from Process PanelsF02800 - SEMI F28 - Test Method for Measuring Particle Generation from Process Panels
SEMI F28 - Test Method for Measuring Particle Generation from Process Panels Sale priceMember Price: $144.00
Non-Member Price: $187.00
F02800 - SEMI F28 - プロセスパネルからのパーティクル発生を測定するテスト方法
F02900 - SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels
SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels Sale priceMember Price: $144.00
Non-Member Price: $187.00
F02900 - SEMI F29 - ガスソースシステムパネルのパージ効果のテスト方法
SEMI F29 - ガスソースシステムパネルのパージ効果のテスト方法 Sale priceMember Price: $171.00
Non-Member Price: $224.00
F03000 - SEMI F30 - Test Method for Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site
F03000 - SEMI F30 - 据付現場における微量ガス不純物およびパーティクルに関する精製器性能テストの始動および検証
F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems
SEMI F31 - Guide for Bulk Chemical Distribution Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00
F03200 - SEMI F32 - Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
F03300 - SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)
F03300 - SEMI F33 - 気圧イオン化質量分析計(APIMS)の較正のためのテスト方法
F03400 - SEMI F34 - Guide for Liquid Chemical Pipe Labeling
SEMI F34 - Guide for Liquid Chemical Pipe Labeling Sale priceMember Price: $144.00
Non-Member Price: $187.00
F03400 - SEMI F34 - 液体化学薬品配管ラベリングに関するガイド
SEMI F34 - 液体化学薬品配管ラベリングに関するガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00
F03500 - SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
F03500 - SEMI F35 - 非浸入式酸素測定を使用した超高純度ガス分配システムの安全性を確認するためのテスト方法
F03600 - SEMI F36 - Guide for Dimensions and Connections of Gas Distribution Components
SEMI F36 - Guide for Dimensions and Connections of Gas Distribution Components Sale priceMember Price: $144.00
Non-Member Price: $187.00
F03700 - SEMI F37 - Test Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
F03700 - SEMI F37 - ガス供給システム構成部品の表面粗さパラメータの算出方法
F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters
SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters Sale priceMember Price: $144.00
Non-Member Price: $187.00
F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法