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F05500 - SEMI F55 - Test Method for Determining the Corrosion Resistance of Mass Flow Controllers
F05500 - SEMI F55 - マスフローコントローラの耐腐食性を求めるための試験方法
F05600 - SEMI F56 - Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers
F05600 - SEMI F56 - マスフローコントローラの定常供給電圧の影響を測定するための試験方法
F05700 - SEMI F57 - Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
F05700 - SEMI F57 - 超純水および薬液供給システム内に使用するポリマー製材料および部品の仕様
F05800 - SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
F05800 - SEMI F58 - 大気圧イオン化質量分析計(APIMS)による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法
F05900 - SEMI F59 - Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves
F06000 - SEMI F60 - Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components
F06000 - SEMI F60 - 不動態化した316Lステンレス・スチール部品の接ガス表面の組成をESCAにより評価する試験方法
F06100 - SEMI F61 - Guide to Design and Operation of a Semiconductor Ultrapure Water System
SEMI F61 - Guide to Design and Operation of a Semiconductor Ultrapure Water System Sale priceMember Price: $144.00
Non-Member Price: $187.00
F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects
F06200 - SEMI F62 - 周囲およびガス温度の影響からマスフローコントローラ性能特性を決定する試験方法
F06300 - SEMI F63 - Guide for Ultrapure Water Used in Semiconductor Processing
SEMI F63 - Guide for Ultrapure Water Used in Semiconductor Processing Sale priceMember Price: $278.00
Non-Member Price: $369.00
F06400 - SEMI F64 - Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers
F06400 - SEMI F64 - マスフローコントローラの指示および実流量に対する圧力影響を測定する試験方法
F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes
F06500 - SEMI F65 - ミリサイズのPFAチューブとともに使用するダイアフラムバルブの取付ベースの寸法仕様
F06600 - SEMI F66 - Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals
F06600 - SEMI F66 - ステンレス製薬液容器のポート標記及び記号の仕様
F06700 - SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity
SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity Sale priceMember Price: $144.00
Non-Member Price: $187.00
F06800 - SEMI F68 - Test Method for Determining Purifier Efficiency
SEMI F68 - Test Method for Determining Purifier Efficiency Sale priceMember Price: $144.00
Non-Member Price: $187.00
F06900 - SEMI F69 - Test Method for Transport and Shock Testing of Gas Delivery Systems
SEMI F69 - Test Method for Transport and Shock Testing of Gas Delivery Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00