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SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P27 - 基板上のレジスト膜厚の測定用パラメータチェックリスト
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P29 - Specification for Characteristics Specific to Attenuated Phase Shift Masks and Masks Blanks
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P29 - 減衰型位相シフトマスク（ハーフトーン型位相シフトマスク）およびマスクブランクスに特有な特性の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P30 - 寸法測定用走査型電子顕微鏡（CD-SEM）の目録発行の実施要領
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P31 - Practice for Catalog Publication for Chemical Amplified (CA) Photoresist Parameter
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P31 - 化学増幅型（CA）フォトレジストパラメータのカタログ発行の作業方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P32 - Test Method for Determination of Trace Metals in Photoresist
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P32 - フォトレジスト中のトレースメタル定量のための試験方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P34 - 230mm方形フォトマスク基板の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P34 - Specification for 230 mm Square Photomask Substrates
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P35 - Terminology for Microlithography Metrology
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P35 - マイクロリソグラフィメトロロジの用語法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P36 - 測長走査型電子顕微鏡（CD-SEM）用倍率標準試料のガイド
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P37 - 極紫外線リソグラフィマスク基板の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P39 - OASISTM – オープン・アートワーク・システム・インターチェンジ・スタンダード（OPEN ARTWORK SYSTEM INTERCHANGE STANDARD）
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P39 - Specification for OASIS® – Open Artwork System Interchange Standard
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI P40 - Specification for Mounting Requirements for Extreme Ultraviolet Lithography Masks
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P40 - 極紫外線リソグラフィマスクの取り付けに関する要求条件およびアライメント基準位置の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00