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F05400 - SEMI F54 - Test Method for Measuring the Counting Efficiency of Condensation Nucleus Counters
F02500 - SEMI F25 - Specification for Particle Concentration of Grade 10/0.2 Oxidant Specialty Gases
F02400 - SEMI F24 - Specification for Particle Concentration of Grade 10/0.2 Inert Specialty Gases
F02900 - SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels
SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels Sale priceMember Price: $148.00
Non-Member Price: $193.00
F08000 - SEMI F80 - Test Method for Determination of Gas Change/Purge Efficiency of Gas Delivery System
F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal
SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal Sale priceMember Price: $148.00
Non-Member Price: $193.00
F10700 - SEMI F107 - Guide for Process Equipment Adapter Plates
SEMI F107 - Guide for Process Equipment Adapter Plates Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09400 - SEMI E94 - コントロールジョブ管理(CJM)の仕様
SEMI E94 - コントロールジョブ管理(CJM)の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E09100 - SEMI E91 - Specification for Prober Specific Equipment Model (PSEM)
E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)
E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases
E06700 - SEMI E67 - Test Method for Determining Reliability of Mass Flow Controller
SEMI E67 - Test Method for Determining Reliability of Mass Flow Controller Sale priceMember Price: $148.00
Non-Member Price: $193.00
E00600 - SEMI E6 - 半導体製造装置の設置に関する文書のガイド
SEMI E6 - 半導体製造装置の設置に関する文書のガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00
E05700 - SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様
E05404 - SEMI E54.4 - Specification for Sensor/Actuator Network Communications for DeviceNet
SEMI E54.4 - Specification for Sensor/Actuator Network Communications for DeviceNet Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen)
E05422 - SEMI E54.22 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
E05418 - SEMI E54.18 - 真空ポンプ機器専用のセンサ/アクチュエータネットワークのデバイスモデルの仕様
E05411 - SEMI E54.11 - エンドポイントデバイスのための特定デバイスモデル
SEMI E54.11 - エンドポイントデバイスのための特定デバイスモデル Sale priceMember Price: $176.00
Non-Member Price: $231.00
E02900 - SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters
E02700 - SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity
SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity Sale priceMember Price: $148.00
Non-Member Price: $193.00
E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller
SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16800 - SEMI E168 - Specification for Product Time Measurement
SEMI E168 - Specification for Product Time Measurement Sale priceMember Price: $148.00
Non-Member Price: $193.00
E15100 - SEMI E151 - Guide for Understanding Data Quality
SEMI E151 - Guide for Understanding Data Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00