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SEMI E160 - Specification for Communication of Data Quality Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers Regular price$300.00 USD Sale price$187.00 USD

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SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling Regular price$300.00 USD Sale price$187.00 USD

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SEMI E157 - Specification for Module Process Tracking Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment Regular price$300.00 USD Sale price$187.00 USD

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SEMI E154 - Specification for Mechanical Features of 450 mm Load Port Regular price$300.00 USD Sale price$187.00 USD

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SEMI E153 - Specification for AMHS SEM (AMHS SEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E151 - Guide for Understanding Data Quality Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E150 - Guide for Equipment Training Best Practices Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E145 - XMLにおける測定単位記号に関する分類 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E145 - Classification for Measurement Unit Symbols in XML Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E142 - Specification for Substrate Mapping Sale priceMember Price: $278.00
Non-Member Price: $369.00

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SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E138 - Specification for XML Semiconductor Common Components Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E137 - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E135 - Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E134 - Specification for Data Collection Management Sale priceMember Price: $144.00
Non-Member Price: $187.00