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E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05410 - SEMI E54.10 - Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
SEMI E54.10 - Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device Sale priceMember Price: $148.00
Non-Member Price: $193.00
E00500 - SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II）
SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II） Sale priceMember Price: $344.00
Non-Member Price: $457.00
E00500 - SEMI E5 - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E5 - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) Sale price Member Price : $377.00
E05100 - SEMI E51 - Guide for Typical Facilities Services and Termination Matrix
SEMI E51 - Guide for Typical Facilities Services and Termination Matrix Sale priceMember Price: $148.00
Non-Member Price: $193.00
E04900 - SEMI E49 - Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI E49 - Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies Sale priceMember Price: $286.00
Non-Member Price: $380.00
E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces
SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Sale priceMember Price: $148.00
Non-Member Price: $193.00
E04300 - SEMI E43 - 物体および表面上の静電気測定のためのガイド
SEMI E43 - 物体および表面上の静電気測定のためのガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00
E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E04000 - SEMI E40 - Specification for Processing Management
SEMI E40 - Specification for Processing Management Sale priceMember Price: $148.00
Non-Member Price: $193.00
E03900 - SEMI E39 - Specification for Object Services: Concepts, Behavior, and Services
SEMI E39 - Specification for Object Services: Concepts, Behavior, and Services Sale priceMember Price: $148.00
Non-Member Price: $193.00
E03700 - SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services Sale priceMember Price: $286.00
Non-Member Price: $380.00
E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Sale priceMember Price: $148.00
Non-Member Price: $193.00
E03300 - SEMI E33 - Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)
SEMI E33 - Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) Sale priceMember Price: $286.00
Non-Member Price: $380.00
E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM)
SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E03001 - SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM)
SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E02900 - SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters
SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters Sale priceMember Price: $148.00
Non-Member Price: $193.00
E02800 - SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller
SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller Sale priceMember Price: $148.00
Non-Member Price: $193.00
E02700 - SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity
SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity Sale priceMember Price: $148.00
Non-Member Price: $193.00
E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume
SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Sale priceMember Price: $148.00
Non-Member Price: $193.00
E02100 - SEMI E21 - Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport
SEMI E21 - Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Sale priceMember Price: $148.00
Non-Member Price: $193.00
E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF)
SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E01904 - SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF)
SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) Sale priceMember Price: $148.00
Non-Member Price: $193.00