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SEMI E83 - Specification for PGV Mechanical Docking Flange Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E80 - マスフローコントローラの姿勢感度（取付位置）決定の試験方法 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E79 - Specification for Definition and Measurement of Equipment Productivity Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E78 - 装置のための静電気放電（ESD）と静電気吸着（ESA）の評価と管理へのガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E77 - マスフローコントローラの換算率の代用ガス使用による計算方法 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E76 - Guide for 300 mm Process Equipment Points of Connection to Facility Services Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E72 - Specification and Guide for Equipment Footprint, Height, and Weight Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E70 - Guide for Tool Accommodation Process Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E69 - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E68 - Test Method for Determining Warm-Up Time of Mass Flow Controllers Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E67 - Test Method for Determining Reliability of Mass Flow Controller Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E66 - Test Method for Determining Particle Contribution by Mass Flow Controllers Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E63 - 300 mmボックスオープナ／ローダーと装置間のスタンダード（BOLTS-M）インタフェースの機械的仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E63 - Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E6 - Guide for Semiconductor Equipment Installation Documentation Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E6 - 半導体製造装置の設置に関する文書のガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E56 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E54 - Specification for Sensor/Actuator Network Sale priceMember Price: $144.00
Non-Member Price: $187.00