Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E157 - モジュールプロセストラッキングの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E158 - 450 mmウェーハ搬送および保管用の工場ウェーハキャリア(450FOUP)とキネマティックカプリングの機械仕様
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Member Price : $176.00
SEMI E159 - ウェーハの搬送及び,輸送のための多目的キャリア(MAC:Multi Application Carrier)の機械仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E161 - トレーニング階層の明確化および分類に関するガイド
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E162 - 450 mmフロントオープニング・シッピングボックス・ロードポートのためのメカニカルインタフェースの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E163 - 特別に指定されたエリア内のレチクルおよびその他の静電気超敏感性(EES:EXTREMELY ELECTROSTATIC SENSITIVE)アイテムの取り扱いのためのガイド
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E166 - 450 mmクラスタモジュール・インタフェースのための仕様:機械的インタフェースおよび搬送のスタンダード
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E169 - 装置情報システムセキュリテイのためのガイド
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F4 - 空気圧動作シリンダバルブの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F5 - ガス状廃棄物処理のガイドライン
Regular price$360.00 USD
Sale price$231.00 USD
SEMI F6 - 危険ガス配管システムの二次封じ込め(ガイドライン)
Regular price$360.00 USD
Sale price$231.00 USD
SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法
Regular price$360.00 USD
Sale price$231.00 USD
SEMI F8 - 引張り力を受けた場合のフロロカーボン製チューブ継手接合部のシール能力を評価する試験方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F9 - サイドロード状態に置かれた場合のフロロカーボン製チューブフィッティング接合部の漏洩特性を測定する試験方法
Regular price$360.00 USD
Sale price$231.00 USD
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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