Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E136 - 半導体処理装置の高周波(RF)電力供給システムで使用されるRF電源の出力を決定するためのテスト方法
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Non-Member Price: $231.00
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SEMI E137 - 半導体製造装置の最終組立,梱包,輸送,開梱,クリーンルームの製造領域への移送のためのガイド
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SEMI E138 - 半導体生産系で共通に使われる情報の構成要素のXML表現
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Non-Member Price: $231.00
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SEMI E139 - レシピとパラメータに関する管理の規定(RaP)
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Non-Member Price: $231.00
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SEMI E142 - 基板マッピングの仕様
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SEMI E143 - 50Ωの負荷に対する出力変動の測定およびすべての位相角において電圧定在波比が2.0の負荷に対する出力変動とスペクトルを測定するための試験方法
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Non-Member Price: $231.00
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SEMI E144 - 半導体製造装置および材料ハンドリング装置におけるキャリア内のRFIDタグとRFIDリーダの間の無線インタフェースの仕様
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Non-Member Price: $231.00
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SEMI E145 - XMLにおける測定単位記号に関する分類
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SEMI E147 - 装置データ取得(EDA)のためのガイド
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SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様
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SEMI E151 - データ品質を理解するためのガイド
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SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様
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SEMI E153 - AMHS SEMの仕様(AMHS SEM)
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SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様
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Non-Member Price: $231.00
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SEMI E156 - 搬送インタフェースに対する450 mm AMHSストッカーの機械的仕様
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
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