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SEMI E131 - Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E132 - Specification for Equipment Client Authentication and Authorization
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Member Price : $148.00
SEMI E132 - 装置クライアントの認証（Authentication）および権限付与（Authorization）のための仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E132 - 장비클라이언트 인증과 권한 부여에 대한 사양
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E133 - Specification for Automated Process Control Systems Interface
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E133 - 自動プロセス制御システムインタフェースの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E134 - Specification for Data Collection Management
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Member Price : $175.00
SEMI E134 - データ収集管理の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E134 - 데이터 수집 관리 사양
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E135 - Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E135 - 半導体処理装置の高周波（RF）電力供給システムの過渡応答を決定するためのRF発振器のテスト方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E136 - 半導体処理装置の高周波（RF）電力供給システムで使用されるRF電源の出力を決定するためのテスト方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E137 - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E137 - 半导体制造设备总装、包装、运输、拆箱和搬运指南
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E137 - 半導体製造装置の最終組立，梱包，輸送，開梱，クリーンルームの製造領域への移送のためのガイド
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E138 - Specification for XML Semiconductor Common Components
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E138 - 半導体生産系で共通に使われる情報の構成要素のXML表現
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E139 - Specification for Recipe and Parameter Management (RaP)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E139 - レシピとパラメータに関する管理の規定（RaP）
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E141 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E142 - Specification for Substrate Mapping
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Member Price : $377.00
SEMI E142 - 基板マッピングの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00