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E12900 - SEMI E129 - 半導体製造設備における静電気放電(ESD)の評価と制御へのガイド
E13000 - SEMI E130 - 300mm環境のプローバ専用装置モデル(PSEM300)に関する仕様
E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
E13100 - SEMI E131 - Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M
E13200 - SEMI E132 - Specification for Equipment Client Authentication and Authorization
SEMI E132 - Specification for Equipment Client Authentication and Authorization Sale priceMember Price: $144.00
Non-Member Price: $187.00
E13200 - SEMI E132 - 装置クライアントの認証(Authentication)および権限付与(Authorization)のための仕様
E13200 - SEMI E132 - 장비클라이언트 인증과 권한 부여에 대한 사양
SEMI E132 - 장비클라이언트 인증과 권한 부여에 대한 사양 Sale priceMember Price: $144.00
Non-Member Price: $187.00
E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface
SEMI E133 - Specification for Automated Process Control Systems Interface Sale priceMember Price: $144.00
Non-Member Price: $187.00
E13300 - SEMI E133 - 自動プロセス制御システムインタフェースの仕様
SEMI E133 - 自動プロセス制御システムインタフェースの仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00
E13400 - SEMI E134 - Specification for Data Collection Management
SEMI E134 - Specification for Data Collection Management Sale priceMember Price: $144.00
Non-Member Price: $187.00
E13400 - SEMI E134 - データ収集管理の仕様
SEMI E134 - データ収集管理の仕様 Sale price Member Price : $171.00
E13400 - SEMI E134 - 데이터 수집 관리 사양
SEMI E134 - 데이터 수집 관리 사양 Sale priceMember Price: $144.00
Non-Member Price: $187.00
E13500 - SEMI E135 - Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
E13500 - SEMI E135 - 半導体処理装置の高周波(RF)電力供給システムの過渡応答を決定するためのRF発振器のテスト方法
E13600 - SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
E13600 - SEMI E136 - 半導体処理装置の高周波(RF)電力供給システムで使用されるRF電源の出力を決定するためのテスト方法
E13700 - SEMI E137 - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment
E13700 - SEMI E137 - 半导体制造设备总装、包装、运输、拆箱和搬运指南
SEMI E137 - 半导体制造设备总装、包装、运输、拆箱和搬运指南 Sale priceMember Price: $144.00
Non-Member Price: $187.00
E13700 - SEMI E137 - 半導体製造装置の最終組立,梱包,輸送,開梱,クリーンルームの製造領域への移送のためのガイド
E13800 - SEMI E138 - Specification for XML Semiconductor Common Components
SEMI E138 - Specification for XML Semiconductor Common Components Sale priceMember Price: $144.00
Non-Member Price: $187.00
E13800 - SEMI E138 - 半導体生産系で共通に使われる情報の構成要素のXML表現
E13900 - SEMI E139 - Specification for Recipe and Parameter Management (RaP)
SEMI E139 - Specification for Recipe and Parameter Management (RaP) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E13900 - SEMI E139 - レシピとパラメータに関する管理の規定(RaP)
SEMI E139 - レシピとパラメータに関する管理の規定(RaP) Sale priceMember Price: $171.00
Non-Member Price: $224.00
E14000 - SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems