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E14100 - SEMI E141 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology
E14200 - SEMI E142 - Specification for Substrate Mapping
SEMI E142 - Specification for Substrate Mapping Sale price Member Price : $278.00
E14200 - SEMI E142 - 基板マッピングの仕様
SEMI E142 - 基板マッピングの仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00
E14300 - SEMI E143 - 50Ωの負荷に対する出力変動の測定およびすべての位相角において電圧定在波比が2.0の負荷に対する出力変動とスペクトルを測定するための試験方法
E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle
E14400 - SEMI E144 - Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment
E14400 - SEMI E144 - 半導体製造装置および材料ハンドリング装置におけるキャリア内のRFIDタグとRFIDリーダの間の無線インタフェースの仕様
E14500 - SEMI E145 - Classification for Measurement Unit Symbols in XML
SEMI E145 - Classification for Measurement Unit Symbols in XML Sale priceMember Price: $144.00
Non-Member Price: $187.00
E14500 - SEMI E145 - XMLにおける測定単位記号に関する分類
SEMI E145 - XMLにおける測定単位記号に関する分類 Sale priceMember Price: $171.00
Non-Member Price: $224.00
E14600 - SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers
E14700 - SEMI E147 - Guide for Equipment Data Acquisition (EDA)
SEMI E147 - Guide for Equipment Data Acquisition (EDA) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E14700 - SEMI E147 - 装置データ取得(EDA)のためのガイド
SEMI E147 - 装置データ取得(EDA)のためのガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00
E14800 - SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object
E14800 - SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様
SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00
E14900 - SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment
E15000 - SEMI E150 - Guide for Equipment Training Best Practices
SEMI E150 - Guide for Equipment Training Best Practices Sale priceMember Price: $144.00
Non-Member Price: $187.00
E151 - SEMI E151 - データ品質を理解するためのガイド
SEMI E151 - データ品質を理解するためのガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00
E15100 - SEMI E151 - Guide for Understanding Data Quality
SEMI E151 - Guide for Understanding Data Quality Sale priceMember Price: $144.00
Non-Member Price: $187.00
E15200 - SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様
SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00
E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles
SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles Sale priceMember Price: $144.00
Non-Member Price: $187.00
E15300 - SEMI E153 - AMHS SEMの仕様(AMHS SEM)
SEMI E153 - AMHS SEMの仕様(AMHS SEM) Sale priceMember Price: $171.00
Non-Member Price: $224.00
E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM)
SEMI E153 - Specification for AMHS SEM (AMHS SEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E15400 - SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様
E15400 - SEMI E154 - Specification for Mechanical Features of 450 mm Load Port
SEMI E154 - Specification for Mechanical Features of 450 mm Load Port Regular price$300.00 USD Sale price$187.00 USD