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E14700 - SEMI E147 - 装置データ取得（EDA）のためのガイド
SEMI E147 - 装置データ取得（EDA）のためのガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00
E14700 - SEMI E147 - Guide for Equipment Data Acquisition (EDA)
SEMI E147 - Guide for Equipment Data Acquisition (EDA) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E13900 - SEMI E139 - Specification for Recipe and Parameter Management (RaP)
SEMI E139 - Specification for Recipe and Parameter Management (RaP) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12700 - SEMI E127 - Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)
SEMI E127 - Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12700 - SEMI E127 - 装置組込み計測モジュール通信の仕様：概念，挙動，サービス（IMMC）
SEMI E127 - 装置組込み計測モジュール通信の仕様：概念，挙動，サービス（IMMC） Sale priceMember Price: $176.00
Non-Member Price: $231.00
E11800 - SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念，動作，サービス
SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念，動作，サービス Sale priceMember Price: $176.00
Non-Member Price: $231.00
E11800 - SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service
SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service Sale priceMember Price: $148.00
Non-Member Price: $193.00
E10700 - SEMI E107 - 歩留まり管理システムに電気的不良データを渡すためのデータフォーマット
SEMI E107 - 歩留まり管理システムに電気的不良データを渡すためのデータフォーマット Sale priceMember Price: $176.00
Non-Member Price: $231.00
E10700 - SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System
SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System Sale priceMember Price: $148.00
Non-Member Price: $193.00
PV05500 - SEMI PV55 - Data Definition Specification for a Horizontal Communication Between Equipment for Photovoltaic Fabrication System
SEMI PV55 - Data Definition Specification for a Horizontal Communication Between Equipment for Photovoltaic Fabrication System Sale priceMember Price: $148.00
Non-Member Price: $193.00
HB00500 - SEMI HB5 - Test Method for Measurement of Saw Marks on Crystalline Sapphire Wafers by Using Optical Probes
SEMI HB5 - Test Method for Measurement of Saw Marks on Crystalline Sapphire Wafers by Using Optical Probes Sale priceMember Price: $148.00
Non-Member Price: $193.00
HB00400 - SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)
SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer
SEMI E99 - Specification for Carrier ID Reader/Writer Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09400 - SEMI E94 - コントロールジョブ管理（CJM）の仕様
SEMI E94 - コントロールジョブ管理（CJM）の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E09400 - SEMI E94 - 컨트롤 잡 관리 사양
SEMI E94 - 컨트롤 잡 관리 사양 Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09400 - SEMI E94 - Specification for Control Job Management
SEMI E94 - Specification for Control Job Management Sale price Member Price : $148.00
E09000 - SEMI E90 - Specification for Substrate Tracking
SEMI E90 - Specification for Substrate Tracking Sale price Member Price : $148.00
E08700 - SEMI E87 - Specification for Carrier Management (CMS)
SEMI E87 - Specification for Carrier Management (CMS) Sale price Member Price : $148.00
E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface Sale priceMember Price: $286.00
Non-Member Price: $380.00
E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen)
SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05423 - SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-LINK® IE
SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-LINK® IE Sale price Member Price : $148.00
E00500 - SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II）
SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II） Sale priceMember Price: $344.00
Non-Member Price: $457.00
E00500 - SEMI E5 - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E5 - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) Sale price Member Price : $286.00
E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Sale priceMember Price: $148.00
Non-Member Price: $193.00
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