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E12700 - SEMI E127 - 装置組込み計測モジュール通信の仕様：概念，挙動，サービス（IMMC）
SEMI E127 - 装置組込み計測モジュール通信の仕様：概念，挙動，サービス（IMMC） Sale priceMember Price: $176.00
Non-Member Price: $231.00
E11800 - SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念，動作，サービス
SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念，動作，サービス Sale priceMember Price: $176.00
Non-Member Price: $231.00
E11800 - SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service
SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service Sale priceMember Price: $148.00
Non-Member Price: $193.00
E10700 - SEMI E107 - 歩留まり管理システムに電気的不良データを渡すためのデータフォーマット
SEMI E107 - 歩留まり管理システムに電気的不良データを渡すためのデータフォーマット Sale priceMember Price: $176.00
Non-Member Price: $231.00
E10700 - SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System
SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System Sale priceMember Price: $148.00
Non-Member Price: $193.00
E10500 - SEMI E105 - Provisional Specification for CIM Framework Scheduling Component
SEMI E105 - Provisional Specification for CIM Framework Scheduling Component Sale priceMember Price: $148.00
Non-Member Price: $193.00
E10500 - SEMI E105 - CIMフレームワークスケジューリングコンポーネントのための暫定仕様
SEMI E105 - CIMフレームワークスケジューリングコンポーネントのための暫定仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E10200 - SEMI E102 - Provisional Specification for CIM Framework Material Transport and Storage Component
SEMI E102 - Provisional Specification for CIM Framework Material Transport and Storage Component Sale priceMember Price: $148.00
Non-Member Price: $193.00
E10200 - SEMI E102 - CIMフレームワークマテリアル搬送・格納コンポーネントに関する暫定仕様
SEMI E102 - CIMフレームワークマテリアル搬送・格納コンポーネントに関する暫定仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer
SEMI E99 - Specification for Carrier ID Reader/Writer Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09400 - SEMI E94 - コントロールジョブ管理（CJM）の仕様
SEMI E94 - コントロールジョブ管理（CJM）の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E09400 - SEMI E94 - 컨트롤 잡 관리 사양
SEMI E94 - 컨트롤 잡 관리 사양 Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09400 - SEMI E94 - Specification for Control Job Management
SEMI E94 - Specification for Control Job Management Sale price Member Price : $148.00
E09100 - SEMI E91 - Specification for Prober Specific Equipment Model (PSEM)
SEMI E91 - Specification for Prober Specific Equipment Model (PSEM) Sale price Member Price : $148.00
E09000 - SEMI E90 - Specification for Substrate Tracking
SEMI E90 - Specification for Substrate Tracking Sale price Member Price : $148.00
E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM)
SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E08700 - SEMI E87 - Specification for Carrier Management (CMS)
SEMI E87 - Specification for Carrier Management (CMS) Sale price Member Price : $148.00
E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM)
SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05400 - SEMI E54 - Specification for Sensor/Actuator Network
SEMI E54 - Specification for Sensor/Actuator Network Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05404 - SEMI E54.4 - DeviceNet用センサ／アクチュエータネットワーク通信スタンダード
SEMI E54.4 - DeviceNet用センサ／アクチュエータネットワーク通信スタンダード Sale priceMember Price: $176.00
Non-Member Price: $231.00
E05404 - SEMI E54.4 - Specification for Sensor/Actuator Network Communications for DeviceNet
SEMI E54.4 - Specification for Sensor/Actuator Network Communications for DeviceNet Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05403 - SEMI E54.3 - マスフローデバイスのためのセンサ／アクチュエータネットワーク（SAN）独自のデバイスモデルのためのスタンダード
SEMI E54.3 - マスフローデバイスのためのセンサ／アクチュエータネットワーク（SAN）独自のデバイスモデルのためのスタンダード Sale priceMember Price: $176.00
Non-Member Price: $231.00
E05403 - SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen)
SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Sale priceMember Price: $148.00
Non-Member Price: $193.00