Individual Standards

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1213 products

E03700 - SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services Sale priceMember Price: $278.00
Non-Member Price: $369.00
E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Sale priceMember Price: $144.00
Non-Member Price: $187.00
E03300 - SEMI E33 - Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)
SEMI E33 - Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) Sale price Member Price : $278.00
E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM)
SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E03001 - SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM)
SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E02900 - SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters
SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters Sale priceMember Price: $144.00
Non-Member Price: $187.00
E02800 - SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller
SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller Sale priceMember Price: $144.00
Non-Member Price: $187.00
E02700 - SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity
SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity Sale priceMember Price: $144.00
Non-Member Price: $187.00
E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume
SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Sale priceMember Price: $144.00
Non-Member Price: $187.00
E02100 - SEMI E21 - Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport
SEMI E21 - Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Sale priceMember Price: $144.00
Non-Member Price: $187.00
E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF)
SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E01904 - SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF)
SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller
SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller Sale priceMember Price: $144.00
Non-Member Price: $187.00
E17600 - SEMI E176 - Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment
SEMI E176 - Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment Sale priceMember Price: $144.00
Non-Member Price: $187.00
E17500 - SEMI E175 - Specification for Subsystem Energy Saving Mode Communication (SESMC)
SEMI E175 - Specification for Subsystem Energy Saving Mode Communication (SESMC) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E17400 - SEMI E174 - Specification for Wafer Job Management (WJM)
SEMI E174 - Specification for Wafer Job Management (WJM) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E17300 - SEMI E173 - Specification for XML SECS-II Message Notation (SMN)
SEMI E173 - Specification for XML SECS-II Message Notation (SMN) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E17200 - SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD)
SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD) Sale price Member Price : $144.00
E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL)
SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E01700 - SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests
SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests Sale priceMember Price: $144.00
Non-Member Price: $187.00
E17000 - SEMI E170 - Specification for Secured Foundation Of Recipe Management System (SFORMS)
SEMI E170 - Specification for Secured Foundation Of Recipe Management System (SFORMS) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E16900 - SEMI E169 - 装置情報システムセキュリテイのためのガイド
SEMI E169 - 装置情報システムセキュリテイのためのガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00
E16900 - SEMI E169 - Guide for Equipment Information System Security
SEMI E169 - Guide for Equipment Information System Security Sale priceMember Price: $144.00
Non-Member Price: $187.00
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