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E11900 - SEMI E119 - 300 mmウェーハの工場間輸送用狭ピッチフロントオープニングボックス(FOBIT)の機械仕様
E11900 - SEMI E119 - Mechanical Specification for Reduced-Pitch Front-Opening Box for Interfactory Transport of 300 mm Wafers
E11800 - SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念,動作,サービス
E11800 - SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard:  Concepts, Behavior and Service
E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports
E10800 - SEMI E108 - Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography/Mass Spectroscopy
E10400 - SEMI E104 - Specification for Integration and Guideline for Calibration of Low-pressure Particle Monitor
E10100 - SEMI E101 - EFEM機能構造モデルのガイド
SEMI E101 - EFEM機能構造モデルのガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00
E10100 - SEMI E101 - Guide for EFEM Functional Structure Model
SEMI E101 - Guide for EFEM Functional Structure Model Sale priceMember Price: $148.00
Non-Member Price: $193.00
E10000 - SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles
E10000 - SEMI E100 - 6インチまたは230 mmのレチクルの搬送および保管に用いられるレチクルSMIFポッド(RSP)の仕様
E00109 - SEMI E1.9 - 300 mmウェーハ搬送および保管用ウェーハカセットの機械仕様
E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
M03100 - SEMI M31 - Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers
F04700 - SEMI F47 - 半導体プロセス装置電圧サグ対応力のための仕様
SEMI F47 - 半導体プロセス装置電圧サグ対応力のための仕様 Sale priceMember Price: $344.00
Non-Member Price: $457.00
F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity
SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity Sale priceMember Price: $286.00
Non-Member Price: $380.00
E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer
SEMI E99 - Specification for Carrier ID Reader/Writer Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09200 - SEMI E92 - Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (Bolts/Light)
E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface Sale priceMember Price: $286.00
Non-Member Price: $380.00
E08300 - SEMI E83 - PGVメカニカルドッキングフランジの仕様
SEMI E83 - PGVメカニカルドッキングフランジの仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange
SEMI E83 - Specification for PGV Mechanical Docking Flange Sale priceMember Price: $148.00
Non-Member Price: $193.00
E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)
E08000 - SEMI E80 - マスフローコントローラの姿勢感度(取付位置)決定の試験方法
E07900 - SEMI E79 - Specification for Definition and Measurement of Equipment Productivity
SEMI E79 - Specification for Definition and Measurement of Equipment Productivity Sale priceMember Price: $148.00
Non-Member Price: $193.00
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