Standards

SEMI Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1000 industry approved standards and guidelines, based on the work of more than 5,000 volunteers.

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C05000 - SEMI C50 - Guide for Trimethylphosphite
SEMI C50 - Guide for Trimethylphosphite Sale priceMember Price: $148.00
Non-Member Price: $193.00
C04900 - SEMI C49 - Guide for Trimethylborate
SEMI C49 - Guide for Trimethylborate Sale priceMember Price: $148.00
Non-Member Price: $193.00
C04900 - SEMI C49 - トリメチルホウ酸のガイド
SEMI C49 - トリメチルホウ酸のガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00
C04800 - SEMI C48 - Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade
SEMI C48 - Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade Sale priceMember Price: $148.00
Non-Member Price: $193.00
C04700 - SEMI C47 - Guide for Trans 1,2 Dichloroethylene
SEMI C47 - Guide for Trans 1,2 Dichloroethylene Sale priceMember Price: $148.00
Non-Member Price: $193.00
C04700 - SEMI C47 - トランス1，2ジクロロエチレンのガイドライン
SEMI C47 - トランス1，2ジクロロエチレンのガイドライン Sale priceMember Price: $176.00
Non-Member Price: $231.00
C04600 - SEMI C46 - 25%テトラメチル水酸化アンモニウムのガイド
SEMI C46 - 25%テトラメチル水酸化アンモニウムのガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00
C04600 - SEMI C46 - Guide for 25% Tetramethylammonium Hydroxide
SEMI C46 - Guide for 25% Tetramethylammonium Hydroxide Sale priceMember Price: $148.00
Non-Member Price: $193.00
C04300 - SEMI C43 - 水酸化ナトリウム50%溶液の仕様
SEMI C43 - 水酸化ナトリウム50%溶液の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C04300 - SEMI C43 - Specification for Sodium Hydroxide, 50% Solution
SEMI C43 - Specification for Sodium Hydroxide, 50% Solution Sale priceMember Price: $148.00
Non-Member Price: $193.00
C04200 - SEMI C42 - Specification for Sodium Hydroxide Pellets
SEMI C42 - Specification for Sodium Hydroxide Pellets Sale priceMember Price: $148.00
Non-Member Price: $193.00
C04200 - SEMI C42 - 水酸化ナトリウム（固体）の仕様
SEMI C42 - 水酸化ナトリウム（固体）の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C03700 - SEMI C37 - りん腐食剤の仕様
SEMI C37 - りん腐食剤の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C03700 - SEMI C37 - Specification for Phosphoric Etchants
SEMI C37 - Specification for Phosphoric Etchants Sale priceMember Price: $148.00
Non-Member Price: $193.00
C03200 - SEMI C32 - メチルエチルケトンの仕様
SEMI C32 - メチルエチルケトンの仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C03200 - SEMI C32 - Specification for Methyl Ethyl Ketone
SEMI C32 - Specification for Methyl Ethyl Ketone Sale priceMember Price: $148.00
Non-Member Price: $193.00
C02600 - SEMI C26 - Specification and Guide for Hexamethyldisilazane (HMDS)
SEMI C26 - Specification and Guide for Hexamethyldisilazane (HMDS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C02200 - SEMI C22 - Guide for Boron Tribromide
SEMI C22 - Guide for Boron Tribromide Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09700 - SEMI C97 - Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinder
SEMI C97 - Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinder Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09600 - SEMI C96 - Test Method for Determining Density of Chemical Mechanical Planarization (CMP) Slurries
SEMI C96 - Test Method for Determining Density of Chemical Mechanical Planarization (CMP) Slurries Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09500 - SEMI C95 - Guide for Pentakis Dimethylamino Tantalum
SEMI C95 - Guide for Pentakis Dimethylamino Tantalum Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09400 - SEMI C94 - Guide for Cyclohexanone
SEMI C94 - Guide for Cyclohexanone Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09300 - SEMI C93 - Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System
SEMI C93 - Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09200 - SEMI C92 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution
SEMI C92 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09100 - SEMI C91 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components
SEMI C91 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems
SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00901 - SEMI C9.1 - Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
SEMI C9.1 - Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08900 - SEMI C89 - Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS)
SEMI C89 - Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08800 - SEMI C88 - Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems
SEMI C88 - Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08700 - SEMI C87 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry
SEMI C87 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08600 - SEMI C86 - Guide for Ethylene Glycol
SEMI C86 - Guide for Ethylene Glycol Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08500 - SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC)
SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08400 - SEMI C84 - Guide for Cyclopentanone
SEMI C84 - Guide for Cyclopentanone Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08300 - SEMI C83 - PFA融着継手で作られる融着接合部に加える引っ張り強度のための試験方法
SEMI C83 - PFA融着継手で作られる融着接合部に加える引っ張り強度のための試験方法 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C08300 - SEMI C83 - Test Method for Tensile Strength Applied to Welded Connections Made by PFA Weld Fitting
SEMI C83 - Test Method for Tensile Strength Applied to Welded Connections Made by PFA Weld Fitting Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08200 - SEMI C82 - Test Method for Particle Removal Performance of Liquid Filter Rated 20 to 50 nm With Liquid-Borne Particle Counter
SEMI C82 - Test Method for Particle Removal Performance of Liquid Filter Rated 20 to 50 nm With Liquid-Borne Particle Counter Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08100 - SEMI C81 - Guide for Tris(Dimethylamino) Silane (3DMAS)
SEMI C81 - Guide for Tris(Dimethylamino) Silane (3DMAS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C08000 - SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS)
SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07900 - SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07800 - SEMI C78 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy
SEMI C78 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07700 - SEMI C77 - Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm
SEMI C77 - Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07600 - SEMI C76 - Guide for Zirconium Tert-Butoxide
SEMI C76 - Guide for Zirconium Tert-Butoxide Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07500 - SEMI C75 - Guide for Tetrakis(Dimethylamino)Titanium
SEMI C75 - Guide for Tetrakis(Dimethylamino)Titanium Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07400 - SEMI C74 - Guide for Hafnium Tert-Butoxide
SEMI C74 - Guide for Hafnium Tert-Butoxide Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07300 - SEMI C73 - Guide for Hafnium Chloride
SEMI C73 - Guide for Hafnium Chloride Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07200 - SEMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA
SEMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA Sale priceMember Price: $148.00
Non-Member Price: $193.00
C07100 - SEMI C71 - Specification and Guide for Boron Trichloride (BCI3)
SEMI C71 - Specification and Guide for Boron Trichloride (BCI3) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C0700 - SEMI C70 - Specification for Tungsten Hexafluoride (WF6)
SEMI C70 - Specification for Tungsten Hexafluoride (WF6) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C06900 - SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets
SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets Sale priceMember Price: $148.00
Non-Member Price: $193.00
C06900 - SEMI C69 - ポリマーペレットの表面積を測定するための試験方法
SEMI C69 - ポリマーペレットの表面積を測定するための試験方法 Sale priceMember Price: $176.00
Non-Member Price: $231.00