Standards

SEMI Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1000 industry approved standards and guidelines, based on the work of more than 5,000 volunteers.

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D01600 - SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port
SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port Sale priceMember Price: $148.00
Non-Member Price: $193.00
D01500 - SEMI D15 - FPDガラス基板の表面うねりの測定方法
SEMI D15 - FPDガラス基板の表面うねりの測定方法 Sale priceMember Price: $176.00
Non-Member Price: $231.00
D01500 - SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method
SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method Sale priceMember Price: $148.00
Non-Member Price: $193.00
D01300 - SEMI D13 - Terminology for FPD Color Filter Assemblies
SEMI D13 - Terminology for FPD Color Filter Assemblies Sale priceMember Price: $148.00
Non-Member Price: $193.00
D01200 - SEMI D12 - FPD基板のエッジ状態の仕様
SEMI D12 - FPD基板のエッジ状態の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
D01200 - SEMI D12 - Specification for Edge Condition of Flat Panel Display (FPD) Substrates
SEMI D12 - Specification for Edge Condition of Flat Panel Display (FPD) Substrates Sale priceMember Price: $148.00
Non-Member Price: $193.00
D01100 - SEMI D11 - FPD用ガラス基板の耐薬品性テスト方法
SEMI D11 - FPD用ガラス基板の耐薬品性テスト方法 Sale priceMember Price: $176.00
Non-Member Price: $231.00
D01100 - SEMI D11 - Specification for Flat Panel Display Glass Substrate Cassettes
SEMI D11 - Specification for Flat Panel Display Glass Substrate Cassettes Sale priceMember Price: $148.00
Non-Member Price: $193.00
D01000 - SEMI D10 - FPD用ガラス基板の耐薬品性テスト方法
SEMI D10 - FPD用ガラス基板の耐薬品性テスト方法 Sale priceMember Price: $176.00
Non-Member Price: $231.00
D01000 - SEMI D10 - Test Method for Chemical Durability of Flat Panel Display Glass Substrates
SEMI D10 - Test Method for Chemical Durability of Flat Panel Display Glass Substrates Sale priceMember Price: $148.00
Non-Member Price: $193.00
C06100 - SEMI C61 - Specification for Bar-Code Container Identification
SEMI C61 - Specification for Bar-Code Container Identification Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00607 - SEMI C6.7 - Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders
SEMI C6.7 - Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00607 - SEMI C6.7 - 高圧ガスシリンダ中のグレード10/0.2窒素に対するパーティクル仕様
SEMI C6.7 - 高圧ガスシリンダ中のグレード10/0.2窒素に対するパーティクル仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00606 - SEMI C6.6 - パイプラインガスとして授受されるグレード10/0.1窒素（N2）およびアルゴン（Ar）に対するパーティクル仕様
SEMI C6.6 - パイプラインガスとして授受されるグレード10/0.1窒素（N2）およびアルゴン（Ar）に対するパーティクル仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00606 - SEMI C6.6 - Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
SEMI C6.6 - Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00605 - SEMI C6.5 - Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
SEMI C6.5 - Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00605 - SEMI C6.5 - パイプラインガスとして授受されるグレード10/0.2窒素（N2）およびアルゴン（Ar）に対するパーティクル仕様
SEMI C6.5 - パイプラインガスとして授受されるグレード10/0.2窒素（N2）およびアルゴン（Ar）に対するパーティクル仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00604 - SEMI C6.4 - パイプラインガスとして授受されるグレード20/0.02窒素（N2）およびアルゴン（Ar）に対するパーティクル仕様
SEMI C6.4 - パイプラインガスとして授受されるグレード20/0.02窒素（N2）およびアルゴン（Ar）に対するパーティクル仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4)
SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C01600 - SEMI C16 - Guide for Precision and Data Reporting Practices
SEMI C16 - Guide for Precision and Data Reporting Practices Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00305 - SEMI C3.5 - Standard for Nitrogen (N2), Bulk Liquid, 99.998% Quality
SEMI C3.5 - Standard for Nitrogen (N2), Bulk Liquid, 99.998% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00354 - SEMI C3.54 - シラン（SiH4）のガス純度ガイドライン
SEMI C3.54 - シラン（SiH4）のガス純度ガイドライン Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality
SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00352 - SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality
SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00351 - SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality
SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00351 - SEMI C3.51 - 三塩化ホウ素（BCl3），品質99.98%の仕様
SEMI C3.51 - 三塩化ホウ素（BCl3），品質99.98%の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00349 - SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality
SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00348 - SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality
SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00345 - SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional)
SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional)
SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00341 - SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality
SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00336 - SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional)
SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00333 - SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional)
SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional) Sale price Member Price : $148.00
C00329 - SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality
SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00328 - SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality
SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00323 - SEMI C3.23 - Standard for Oxygen (O2), 99.98% Quality
SEMI C3.23 - Standard for Oxygen (O2), 99.98% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00322 - SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality
SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00315 - SEMI C3.15 - Standard for Nitrogen (N2), In Cylinders, 99.9992% Quality
SEMI C3.15 - Standard for Nitrogen (N2), In Cylinders, 99.9992% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00200 - SEMI C2 - Specifications for Etchants
SEMI C2 - Specifications for Etchants Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00604 - SEMI C6.4 - Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
SEMI C6.4 - Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00603 - SEMI C6.3 - Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas
SEMI C6.3 - Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00603 - SEMI C6.3 - パイプラインガスとして授受されるグレード20/0.2水素（H2）に対するパーティクル仕様
SEMI C6.3 - パイプラインガスとして授受されるグレード20/0.2水素（H2）に対するパーティクル仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00602 - SEMI C6.2 - パイプラインガスとして授受されるグレード20/0.02酸素に対するパーティクル仕様
SEMI C6.2 - パイプラインガスとして授受されるグレード20/0.02酸素に対するパーティクル仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00602 - SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00331 - SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional)
SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00330 - SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality
SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality
SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00319 - SEMI C3.19 - Standard for Hydrogen (H2), 99.9995% Quality
SEMI C3.19 - Standard for Hydrogen (H2), 99.9995% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00318 - SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality
SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C05000 - SEMI C50 - トリメチルホスフィンのガイド
SEMI C50 - トリメチルホスフィンのガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00