Standards

SEMI Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1000 industry approved standards and guidelines, based on the work of more than 5,000 volunteers.

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C00339 - SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様
SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様
SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C02900 - SEMI C29 - 4.9%フッ化ケイ素酸（10:1 V/V）の仕様とガイドライン
SEMI C29 - 4.9%フッ化ケイ素酸（10:1 V/V）の仕様とガイドライン Sale priceMember Price: $176.00
Non-Member Price: $231.00
C02800 - SEMI C28 - フッ化ケイ素酸の仕様
SEMI C28 - フッ化ケイ素酸の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride)
SEMI C25 - Specification for Dichloromethane (Methylene Chloride) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C02100 - SEMI C21 - 水酸化アンモニウムの仕様とガイドライン
SEMI C21 - 水酸化アンモニウムの仕様とガイドライン Sale priceMember Price: $176.00
Non-Member Price: $231.00
C00100 - SEMI C1 - 液体化学薬品の分析のためのガイド
SEMI C1 - 液体化学薬品の分析のためのガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00
PV00400 - SEMI PV4 - Specification for Range of 5th Generation Substrate Sizes for Thin Film Photovoltaic Applications
SEMI PV4 - Specification for Range of 5th Generation Substrate Sizes for Thin Film Photovoltaic Applications Sale priceMember Price: $148.00
Non-Member Price: $193.00
P00800 - SEMI P8 - Test Method for the Determination of Water in Photoresist
SEMI P8 - Test Method for the Determination of Water in Photoresist Sale priceMember Price: $148.00
Non-Member Price: $193.00
P00700 - SEMI P7 - Test Method of Viscosity Determination, Method A - Kinematic Viscosity
SEMI P7 - Test Method of Viscosity Determination, Method A - Kinematic Viscosity Sale priceMember Price: $148.00
Non-Member Price: $193.00
P00600 - SEMI P6 - フォトマスク用レジストレーションマーク
SEMI P6 - フォトマスク用レジストレーションマーク Sale priceMember Price: $176.00
Non-Member Price: $231.00
P00600 - SEMI P6 - Specification for Registration Marks for Photomasks
SEMI P6 - Specification for Registration Marks for Photomasks Sale priceMember Price: $148.00
Non-Member Price: $193.00
P04700 - SEMI P47 - Test Method for Evaluation of Line-Edge Roughness and Linewidth Roughness
SEMI P47 - Test Method for Evaluation of Line-Edge Roughness and Linewidth Roughness Sale priceMember Price: $148.00
Non-Member Price: $193.00
P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML
SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Sale priceMember Price: $148.00
Non-Member Price: $193.00
P04300 - SEMI P43 - Photomask Qualification Terminology
SEMI P43 - Photomask Qualification Terminology Sale priceMember Price: $148.00
Non-Member Price: $193.00
P04200 - SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様
SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System
SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System Sale priceMember Price: $148.00
Non-Member Price: $193.00
P04100 - SEMI P41 - XMLによる，検査装置，修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様
SEMI P41 - XMLによる，検査装置，修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
P04100 - SEMI P41 - Specification for Mask Defect Data Handling with XML, Between Defect Inspection Tools, Repair Tools, and Review Tools
SEMI P41 - Specification for Mask Defect Data Handling with XML, Between Defect Inspection Tools, Repair Tools, and Review Tools Sale priceMember Price: $148.00
Non-Member Price: $193.00
P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks
SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks Sale priceMember Price: $148.00
Non-Member Price: $193.00
P03500 - SEMI P35 - Terminology for Microlithography Metrology
SEMI P35 - Terminology for Microlithography Metrology Sale priceMember Price: $148.00
Non-Member Price: $193.00
P03400 - SEMI P34 - 230mm方形フォトマスク基板の仕様
SEMI P34 - 230mm方形フォトマスク基板の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
P03400 - SEMI P34 - Specification for 230 mm Square Photomask Substrates
SEMI P34 - Specification for 230 mm Square Photomask Substrates Sale priceMember Price: $148.00
Non-Member Price: $193.00
P03200 - SEMI P32 - フォトレジスト中のトレースメタル定量のための試験方法
SEMI P32 - フォトレジスト中のトレースメタル定量のための試験方法 Sale priceMember Price: $176.00
Non-Member Price: $231.00
P03200 - SEMI P32 - Test Method for Determination of Trace Metals in Photoresist
SEMI P32 - Test Method for Determination of Trace Metals in Photoresist Sale priceMember Price: $148.00
Non-Member Price: $193.00
P03100 - SEMI P31 - Practice for Catalog Publication for Chemical Amplified (CA) Photoresist Parameter
SEMI P31 - Practice for Catalog Publication for Chemical Amplified (CA) Photoresist Parameter Sale priceMember Price: $148.00
Non-Member Price: $193.00
P00300 - SEMI P3 - レジスト付きクロムブランク
SEMI P3 - レジスト付きクロムブランク Sale priceMember Price: $176.00
Non-Member Price: $231.00
P00300 - SEMI P3 - Specification for Photoresist/E-Beam Resist for Hard Surface Photoplates
SEMI P3 - Specification for Photoresist/E-Beam Resist for Hard Surface Photoplates Sale priceMember Price: $148.00
Non-Member Price: $193.00
P03000 - SEMI P30 - 寸法測定用走査型電子顕微鏡（CD-SEM）の目録発行の実施要領
SEMI P30 - 寸法測定用走査型電子顕微鏡（CD-SEM）の目録発行の実施要領 Sale priceMember Price: $176.00
Non-Member Price: $231.00
P03000 - SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM)
SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02800 - SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン
SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン Sale priceMember Price: $176.00
Non-Member Price: $231.00
P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture
SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02700 - SEMI P27 - 基板上のレジスト膜厚の測定用パラメータチェックリスト
SEMI P27 - 基板上のレジスト膜厚の測定用パラメータチェックリスト Sale priceMember Price: $176.00
Non-Member Price: $231.00
P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate
SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02600 - SEMI P26 - フォトレジストの感度測定用パラメータチェックリスト
SEMI P26 - フォトレジストの感度測定用パラメータチェックリスト Sale priceMember Price: $176.00
Non-Member Price: $231.00
P02600 - SEMI P26 - Parameter Checklist for Photoresist Sensitivity Measurement
SEMI P26 - Parameter Checklist for Photoresist Sensitivity Measurement Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様）
SEMI P25 - 焦点深度および最適焦点深度（仕様） Sale priceMember Price: $176.00
Non-Member Price: $231.00
P02500 - SEMI P25 - Specification for Measuring Depth of Focus and Best Focus
SEMI P25 - Specification for Measuring Depth of Focus and Best Focus Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02400 - SEMI P24 - CD測長手順
SEMI P24 - CD測長手順 Sale priceMember Price: $176.00
Non-Member Price: $231.00
P02400 - SEMI P24 - CD Metrology Procedures
SEMI P24 - CD Metrology Procedures Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02300 - SEMI P23 - プログラム欠陥マスクおよびマスク欠陥検査システムの感度分析ベンチマーク手順についてのガイドライン
SEMI P23 - プログラム欠陥マスクおよびマスク欠陥検査システムの感度分析ベンチマーク手順についてのガイドライン Sale priceMember Price: $176.00
Non-Member Price: $231.00
P02300 - SEMI P23 - Guidelines for Programmed Defect Masks and Benchmark Procedures for Sensitivity Analysis of Mask Defect Inspection Systems
SEMI P23 - Guidelines for Programmed Defect Masks and Benchmark Procedures for Sensitivity Analysis of Mask Defect Inspection Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02100 - SEMI P21 - Guidelines for Precision and Accuracy Expression for Mask Writing Equipment
SEMI P21 - Guidelines for Precision and Accuracy Expression for Mask Writing Equipment Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02100 - SEMI P21 - マスク描画装置の精度表示のガイドライン
SEMI P21 - マスク描画装置の精度表示のガイドライン Sale priceMember Price: $176.00
Non-Member Price: $231.00
P00200 - SEMI P2 - ハードサーフェス・フォトマスク用クロムブランク
SEMI P2 - ハードサーフェス・フォトマスク用クロムブランク Sale priceMember Price: $176.00
Non-Member Price: $231.00
P00200 - SEMI P2 - Specification for Chrome Thin Films for Hard Surface Photomasks
SEMI P2 - Specification for Chrome Thin Films for Hard Surface Photomasks Sale priceMember Price: $148.00
Non-Member Price: $193.00
P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案）
SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） Sale priceMember Price: $176.00
Non-Member Price: $231.00
P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal)
SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) Sale priceMember Price: $148.00
Non-Member Price: $193.00
P01900 - SEMI P19 - 集積回路製造用メトロロジパターンセル
SEMI P19 - 集積回路製造用メトロロジパターンセル Sale priceMember Price: $176.00
Non-Member Price: $231.00
P01900 - SEMI P19 - Specification for Metrology Pattern Cells for Integrated Circuit Manufacture
SEMI P19 - Specification for Metrology Pattern Cells for Integrated Circuit Manufacture Sale priceMember Price: $148.00
Non-Member Price: $193.00