Standards

SEMI Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1000 industry approved standards and guidelines, based on the work of more than 5,000 volunteers.

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F08300 - SEMI F83 - 1.125インチタイプ2ファスナー構造サーフェスマウント型ガス供給システム用2ポートコンポーネント（MFC/MFMを除く）の寸法のための仕様
SEMI F83 - 1.125インチタイプ2ファスナー構造サーフェスマウント型ガス供給システム用2ポートコンポーネント（MFC/MFMを除く）の寸法のための仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
F08300 - SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
F08200 - SEMI F82 - Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems
SEMI F82 - Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
F08200 - SEMI F82 - 1.125インチタイプサーフェスマウント型ガス供給システム用マスフローコントローラ／マスフローメータの寸法のための仕様
SEMI F82 - 1.125インチタイプサーフェスマウント型ガス供給システム用マスフローコントローラ／マスフローメータの寸法のための仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
F00800 - SEMI F8 - Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces
SEMI F8 - Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces Sale priceMember Price: $148.00
Non-Member Price: $193.00
F00800 - SEMI F8 - 引張り力を受けた場合のフロロカーボン製チューブ継手接合部のシール能力を評価する試験方法
SEMI F8 - 引張り力を受けた場合のフロロカーボン製チューブ継手接合部のシール能力を評価する試験方法 Sale priceMember Price: $176.00
Non-Member Price: $231.00
F00700 - SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法
SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法 Regular price$360.00 USD Sale price$231.00 USD
F00700 - SEMI F7 - Test Method to Determine the Tensile Strength of Tube Fitting Connections Made of Fluorocarbon Materials
SEMI F7 - Test Method to Determine the Tensile Strength of Tube Fitting Connections Made of Fluorocarbon Materials Sale priceMember Price: $148.00
Non-Member Price: $193.00
F07100 - SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System
SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System Regular price$300.00 USD Sale price$193.00 USD
F00600 - SEMI F6 - 危険ガス配管システムの二次封じ込め（ガイドライン）F00600 - SEMI F6 - 危険ガス配管システムの二次封じ込め（ガイドライン）
SEMI F6 - 危険ガス配管システムの二次封じ込め（ガイドライン） Regular price$360.00 USD Sale price$231.00 USD
F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems
SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems Regular price$300.00 USD Sale price$193.00 USD
F06600 - SEMI F66 - Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals
SEMI F66 - Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals Regular price$300.00 USD Sale price$193.00 USD
F06600 - SEMI F66 - ステンレス製薬液容器のポート標記及び記号の仕様
SEMI F66 - ステンレス製薬液容器のポート標記及び記号の仕様 Regular price$360.00 USD Sale price$231.00 USD
F06500 - SEMI F65 - ミリサイズのPFAチューブとともに使用するダイアフラムバルブの取付ベースの寸法仕様
SEMI F65 - ミリサイズのPFAチューブとともに使用するダイアフラムバルブの取付ベースの寸法仕様 Regular price$360.00 USD Sale price$231.00 USD
F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes
SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Regular price$300.00 USD Sale price$193.00 USD
F05800 - SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
F05800 - SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法
SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 Regular price$360.00 USD Sale price$231.00 USD
F05200 - SEMI F52 - 半導体及びFPD製造の薬液供給システム用メトリックPFAチューブの寸法仕様
SEMI F52 - 半導体及びFPD製造の薬液供給システム用メトリックPFAチューブの寸法仕様 Regular price$360.00 USD Sale price$231.00 USD
F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing
SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Sale priceMember Price: $148.00
Non-Member Price: $193.00
F00500 - SEMI F5 - Guide for Gaseous Effluent Handling
SEMI F5 - Guide for Gaseous Effluent Handling Sale priceMember Price: $148.00
Non-Member Price: $193.00
F00500 - SEMI F5 - ガス状廃棄物処理のガイドライン
SEMI F5 - ガス状廃棄物処理のガイドライン Regular price$360.00 USD Sale price$231.00 USD
F04600 - SEMI F46 -
SEMI F46 - Sale priceMember Price: $176.00
Non-Member Price: $180.00
F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems
SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems Regular price$300.00 USD Sale price$193.00 USD
F00400 - SEMI F4 - Specification for Pneumatically Actuated Cylinder Valves
SEMI F4 - Specification for Pneumatically Actuated Cylinder Valves Sale priceMember Price: $148.00
Non-Member Price: $193.00
F03500 - SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement Sale priceMember Price: $148.00
Non-Member Price: $193.00
F03500 - SEMI F35 - 非浸入式酸素測定を使用した超高純度ガス分配システムの安全性を確認するためのテスト方法
SEMI F35 - 非浸入式酸素測定を使用した超高純度ガス分配システムの安全性を確認するためのテスト方法 Regular price$360.00 USD Sale price$231.00 USD
F03300 - SEMI F33 - 気圧イオン化質量分析計（APIMS）の較正のためのテスト方法
SEMI F33 - 気圧イオン化質量分析計（APIMS）の較正のためのテスト方法 Regular price$360.00 USD Sale price$231.00 USD
F03300 - SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)
SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
F02700 - SEMI F27 - ガス配分システムおよび部品の水分相互作用および含有量の大気圧電離質量分析（APIMS）による，テスト方法
SEMI F27 - ガス配分システムおよび部品の水分相互作用および含有量の大気圧電離質量分析（APIMS）による，テスト方法 Regular price$360.00 USD Sale price$231.00 USD
F01800 - SEMI F18 - Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing
SEMI F18 - Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing Sale priceMember Price: $148.00
Non-Member Price: $193.00
F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures
SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures Regular price$300.00 USD Sale price$193.00 USD
F01300 - SEMI F13 - Guide for Gas Source Control Equipment
SEMI F13 - Guide for Gas Source Control Equipment Sale priceMember Price: $148.00
Non-Member Price: $193.00
F01200 - SEMI F12 - フッ素樹脂製フィッティングの熱サイクル負荷後のシール性能決定の試験方法
SEMI F12 - フッ素樹脂製フィッティングの熱サイクル負荷後のシール性能決定の試験方法 Regular price$360.00 USD Sale price$231.00 USD
F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle
SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Regular price$300.00 USD Sale price$193.00 USD
F01100 - SEMI F11 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials
SEMI F11 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials Regular price$300.00 USD Sale price$193.00 USD
F01100 - SEMI F11 - フッ素樹脂製チューブフィッティングの熱的特性指標を得るための試験方法
SEMI F11 - フッ素樹脂製チューブフィッティングの熱的特性指標を得るための試験方法 Regular price$360.00 USD Sale price$231.00 USD
F00100 - SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様
SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
F00100 - SEMI F1 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
SEMI F1 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components Sale priceMember Price: $148.00
Non-Member Price: $193.00
F10800 - SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications Regular price$300.00 USD Sale price$193.00 USD
F10600 - SEMI F106 - ヘリウム漏れ検出器によるガス供給システムの漏れ完全性を確認するためのテスト方法
SEMI F106 - ヘリウム漏れ検出器によるガス供給システムの漏れ完全性を確認するためのテスト方法 Regular price$360.00 USD Sale price$231.00 USD
F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector
SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Sale priceMember Price: $148.00
Non-Member Price: $193.00
F10300 - SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals
SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals Regular price$300.00 USD Sale price$193.00 USD
F10300 - SEMI F103 - ステンレススチール製液体原料容器（キャニスター）の形状の仕様
SEMI F103 - ステンレススチール製液体原料容器（キャニスター）の形状の仕様 Regular price$360.00 USD Sale price$231.00 USD
F102000 - SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems
SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
F01000 - SEMI F10 - フッ素樹脂製チューブフィッティングに損傷を生じさせるのに必要な内部圧力を決定するためのテスト方法
SEMI F10 - フッ素樹脂製チューブフィッティングに損傷を生じさせるのに必要な内部圧力を決定するためのテスト方法 Regular price$360.00 USD Sale price$231.00 USD
F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials
SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials Regular price$300.00 USD Sale price$193.00 USD
F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube
SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube Regular price$300.00 USD Sale price$193.00 USD
E09800 - SEMI E98 - オブジェクトベース装置モデル（OBEM）暫定スタンダード
SEMI E98 - オブジェクトベース装置モデル（OBEM）暫定スタンダード Sale priceMember Price: $176.00
Non-Member Price: $231.00
E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00