Standards

SEMI Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1000 industry approved standards and guidelines, based on the work of more than 5,000 volunteers.

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E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard
SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16500 - SEMI E165 - Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available
SEMI E165 - Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16400 - SEMI E164 - Specification for EDA Common Metadata
SEMI E164 - Specification for EDA Common Metadata Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas
SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Sale priceMember Price: $148.00
Non-Member Price: $193.00
E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates
SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16000 - SEMI E160 - Specification for Communication of Data Quality
SEMI E160 - Specification for Communication of Data Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
E15900 - SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers Regular price$300.00 USD Sale price$193.00 USD
E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling Regular price$300.00 USD Sale price$193.00 USD
E15700 - SEMI E157 - Specification for Module and Substrate Process TrackingE15700 - SEMI E157 - Specification for Module and Substrate Process Tracking
SEMI E157 - Specification for Module and Substrate Process Tracking Sale price Member Price : $148.00
E15600 - SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment
SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment Regular price$300.00 USD Sale price$193.00 USD
E15400 - SEMI E154 - Specification for Mechanical Features of 450 mm Load Port
SEMI E154 - Specification for Mechanical Features of 450 mm Load Port Regular price$300.00 USD Sale price$193.00 USD
E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM)
SEMI E153 - Specification for AMHS SEM (AMHS SEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E15200 - SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様
SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles
SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles Sale priceMember Price: $148.00
Non-Member Price: $193.00
E15100 - SEMI E151 - Guide for Understanding Data Quality
SEMI E151 - Guide for Understanding Data Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
E15000 - SEMI E150 - Guide for Equipment Training Best Practices
SEMI E150 - Guide for Equipment Training Best Practices Sale priceMember Price: $148.00
Non-Member Price: $193.00
E14900 - SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment
SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment Sale priceMember Price: $148.00
Non-Member Price: $193.00
E14800 - SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object
SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object Sale priceMember Price: $148.00
Non-Member Price: $193.00
E14800 - SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様
SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E14500 - SEMI E145 - XMLにおける測定単位記号に関する分類
SEMI E145 - XMLにおける測定単位記号に関する分類 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E14500 - SEMI E145 - Classification for Measurement Unit Symbols in XML
SEMI E145 - Classification for Measurement Unit Symbols in XML Sale priceMember Price: $148.00
Non-Member Price: $193.00
E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle
SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle Sale priceMember Price: $148.00
Non-Member Price: $193.00
E14200 - SEMI E142 - Specification for Substrate Mapping
SEMI E142 - Specification for Substrate Mapping Sale price Member Price : $286.00
E14000 - SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
E13800 - SEMI E138 - Specification for XML Semiconductor Common Components
SEMI E138 - Specification for XML Semiconductor Common Components Sale priceMember Price: $148.00
Non-Member Price: $193.00
E13700 - SEMI E137 - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment
SEMI E137 - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment Sale priceMember Price: $148.00
Non-Member Price: $193.00
E13600 - SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
E13500 - SEMI E135 - Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
SEMI E135 - Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment Sale priceMember Price: $148.00
Non-Member Price: $193.00
E13400 - SEMI E134 - Specification for Data Collection Management
SEMI E134 - Specification for Data Collection Management Sale price Member Price : $148.00
E13400 - SEMI E134 - 데이터 수집 관리 사양
SEMI E134 - 데이터 수집 관리 사양 Sale priceMember Price: $148.00
Non-Member Price: $193.00
E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface
SEMI E133 - Specification for Automated Process Control Systems Interface Sale priceMember Price: $148.00
Non-Member Price: $193.00
E13200 - SEMI E132 - Specification for Equipment Client Authentication and Authorization
SEMI E132 - Specification for Equipment Client Authentication and Authorization Sale price Member Price : $148.00
E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12900 - SEMI E129 - 半導体製造設備における静電気放電（ESD）の評価と制御へのガイド
SEMI E129 - 半導体製造設備における静電気放電（ESD）の評価と制御へのガイド Sale priceMember Price: $176.00
Non-Member Price: $231.00
E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility
SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12800 - SEMI E128 - Specification for XML Message Structures
SEMI E128 - Specification for XML Message Structures Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12800 - SEMI E128 - XML メッセージ構造に関する仕様
SEMI E128 - XML メッセージ構造に関する仕様 Sale priceMember Price: $176.00
Non-Member Price: $231.00
E12600 - SEMI E126 - Specification for Equipment Quality Information Parameters (EQIP)
SEMI E126 - Specification for Equipment Quality Information Parameters (EQIP) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12500 - SEMI E125 - Specification for Equipment Self Description (EqSD)
SEMI E125 - Specification for Equipment Self Description (EqSD) Sale price Member Price : $148.00
E12500 - SEMI E125 - EQUIPMENT SELF DESCRIPTION 사양
SEMI E125 - EQUIPMENT SELF DESCRIPTION 사양 Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12300 - SEMI E123 - ハンドラ装置の特定装置モデル（HSEM）のスタンダード
SEMI E123 - ハンドラ装置の特定装置モデル（HSEM）のスタンダード Sale priceMember Price: $176.00
Non-Member Price: $231.00
E12300 - SEMI E123 - Specification for Handler Equipment Specific Equipment Model (HSEM)
SEMI E123 - Specification for Handler Equipment Specific Equipment Model (HSEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12200 - SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM)
SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E01200 - SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12100 - SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications Sale priceMember Price: $148.00
Non-Member Price: $193.00
E12000 - SEMI E120 - Specification for the Common Equipment Model (CEM)
SEMI E120 - Specification for the Common Equipment Model (CEM) Sale price Member Price : $148.00
E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양
SEMI E120 - COMMON EQUIPMENT MODEL 사양 Sale priceMember Price: $148.00
Non-Member Price: $193.00
E11700 - SEMI E117 - Specification for Reticle Load Port
SEMI E117 - Specification for Reticle Load Port Sale priceMember Price: $148.00
Non-Member Price: $193.00
E11600 - SEMI E116 - Specification for Equipment Performance Tracking
SEMI E116 - Specification for Equipment Performance Tracking Sale priceMember Price: $286.00
Non-Member Price: $380.00
E11500 - SEMI E115 - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems
SEMI E115 - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00